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Spectroscopic Ellipsometer Family SENresearch |
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Spectroscopic Ellipsometer Family SENresearch
Widest spectral range
The SENresearch ellipsometer family covers the widest spectral range from 190nm (deep UV) to 3,500nm (NIR) in one tool. FTIR is applied in the near infrared, allowing an extension to 3,500nm at highest spectral resolution and speed.
Step Scan Analyzer principle:
The Step Scan Analyzer principle is a unique feature of the SANTECH ellipsometer family. During data acquisition, polarizer and wide band compensator are fixed to provide highest accuracy of the ellipsometric measurement.
The SENresearch measures thin film thickness, refractive index, extinction coefficient, and related properties of bulk materials, single layers, and multilayer stacks. Isotropic and anisotropic materials, surface and interface roughness as well as gradients can be analyzed. Furthermore, SpectraRay/3, SANTECH proprietary ellipsometer software, treats sample effects like depolarization, non-uniformity, scattering (Mueller-matrix), and backside reflection.
The SENresearch represents the high end of SANTECH ellipsometers. The compact table top instrument comprises the ellipsometer optics, goniometer, sample platform, auto-collimating telescope, light source, and detection unit. It can be extended by a variety of options Options: Spectral ranges Automated goniometer Microspot Mapping stages(50x50–300x300mm) Autofocus, -alignment Video camera Reflectometer Sample cells Heating stage Cryostat for any R & D and routine application.
The SENresearch is focused on speed and accuracy for insitu and exsitu measurements of thin films wherever they are applied. Applications range from measuring on textured surfaces to determining the conductivity of TCO films, from insitu monitoring of deposition processes to offline mapping on large glass panels. With the latest development launched by SANTECH, magnetooptical Spectral generalized magneto-optical ellipsometer–combined Kerr spectroscopy, MOKE, and spectroscopic ellipsometry properties can be characterized. For a large variety of applicationsApplications in: R & D Nanotechnology Photovoltaics Microelectronics Optoelectronics Organic electronics Glass coatings Display technology Bioscience Life science predefined recipes are offered by SpectraRay/3.
SpectraRay/3
SpectraRay/3, the SANTECH proprietary ellipsometer software, comprises two modes of operation: recipe mode and interactive mode. The recipe mode SpectraRay/3 recipe mode: Recipe selection allows for easy execution of repetitive applications. In interactive mode SpectraRay/3 interactive mode: Modeling, ellipsometric measurements are enhanced by an interactive, guiding graphical user interface. Large materials database and all applicable dispersion models are included. Multiple angle of incidence, multiple sample, and combined photometric measurements are supported by SpectraRay/3.
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